FOUP AMCs Monitoring Equipment

NFA-1007F On-line monitoring equipment monitors VOCs contaminants in FUPO air, have a critical impact on product yield and product process


Stationary type: automatic online Foup analysis equipment for 7-24 operation
Dual mode options for communication interaction mode and manual mode
Maximum option for 300mm Foup and 250mm Pod
Defined more than 200 kinds of low to high b.p. volatile organics
Integrated analysis process with optimized detection recipe
ISTD and STD correction system (STD & ISTD gas)
Smart interlock function, single point or matrix interlock
Control and database system
User-friendly interface and remote control
Database library and reporting system
Option for customized recipe