NFA-iSQ 
Semi automatic Trace Element Standard Quantitative System            

Based on NF technology, traditional QC lab process (sampling、calibration 、 QC-check and reporting) can be easily replaced by NFA-iSQ. It is not only effective for semiconductor industry but also for fine chemicals manufacturer.

Feature  


PFA sample bottle of batch sampling for analysis.
Undiluted measurement for ultra-pure chemicals of 70% HNO3、49% HF、29%NH4OH 、31% H2O2、IPA 、nBAC, …etc.
Exclusive multi-element NF-STD.
ICPQQQ recipes certified by NF Lab with 1ppt analysis capability under TAF certification.
Unique on-line auto-dilute module.
Intelligent NF-HMI control interface.
User friendly remote assistance design.
AI lock spot and upload for OOC with auto-retained module (option).
Auto-upload to customer CIM system with customized report layout .

Specification  

Description
Application 70% HNO3、49% HF、NH4F、BOE、98% H2SO4、29% NH4OH 、31% H2O2、IPA 、86% H3PO4、nBAC、TMHA、NMP、DMSO … etc. 
NF provides professional customized application based on unique process for different chemicals
Element >60 Elements
Accuracy R value >0.995 ; QC sample recovery rate ±20% 
Detection limit < 0.5 ppt (Reference attachment MDL table)
Stability RSD <15 %  (5 ppt Multi-element mixed standard solution spike in H2O )
Recovery Recovery rate ±20 % 
(5 ppt Multi-element mixed standard solution spike in 49% HF / 9.6%H2SO/ 31% H2O2)
Utility gas N2
Utility power 1 Phase,10 A,50~60 Hz 
Dimension 705 mm X 800 mm X 845 mm ; 150 kg
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