NFA-1007w
Automatic WOS Analysis Equipment
NFA-1007w
Automatic WOS Analysis Equipment
| Feature |
Stationary type: automatic online WOS analysis equipment for 7-24 operation
Dual mode options for communication interaction mode and manual mode
Maximum option for 300mm wafer
Defined more than 200 kinds of low to high b.p. volatile organics
Integrated analysis process with optimized detection recipe
ISTD and STD correction system (STD & ISTD gas)
Smart interlock function, single point or matrix interlock
Control and database system
User-friendly interface and remote control
Database library and reporting system
Refer to SEMI & ASTM method
Dual mode options for communication interaction mode and manual mode
Maximum option for 300mm wafer
Defined more than 200 kinds of low to high b.p. volatile organics
Integrated analysis process with optimized detection recipe
ISTD and STD correction system (STD & ISTD gas)
Smart interlock function, single point or matrix interlock
Control and database system
User-friendly interface and remote control
Database library and reporting system
Refer to SEMI & ASTM method
| Specification |
| Description | |
| Measuring species | TVOC (Total Volatile Organic Compound)、Heavy hydrocarbon 、TMA、DEF、Plasticizers …etc. |
| Quantitative mode | Semiquantitative analysis with toluene |
| Utility gas | Nitrogen、Helium、CDA |
| Utility power | 3 Phase 220 V，30 A，50~60 Hz |
| Size / Weight | 2460 mm X 1650 mm X 2250 mm ; 2,000 kg |
| << more information please contact us >> | |
