Automatic WOS Analysis Equipment

Stationary type: automatic online WOS analysis equipment for 7-24 operation
Dual mode options for communication interaction mode and manual mode

Maximum option for 300mm wafer

Defined more than 200 kinds of low to high b.p. volatile organics
Integrated analysis process with optimized detection recipe

ISTD and STD correction system (STD & ISTD gas)

Smart interlock function, single point or matrix interlock

Control and database system

User-friendly interface and remote control
Database library and reporting system
Refer to SEMI & ASTM method


Measuring species TVOC (Total Volatile Organic Compound)、Heavy hydrocarbon 、TMA、DEF、Plasticizers …etc.
Quantitative mode Semiquantitative analysis with toluene
Utility gas Nitrogen、Helium、CDA
Utility power 3 Phase 220 V,30 A,50~60 Hz 
Size / Weight 2460 mm X 1650 mm X 2250 mm ; 2,000 kg
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