IS-T10R 
Semi On-line Trace Element Analysis Equipment         

Based on NF technology, traditional QC lab process (sampling、calibration 、 QC-check and reporting) can be easily replaced by IS-T10R. It is not only effective for semiconductor industry but also for fine chemicals manufacturer.

Feature  


PFA sample bottle of batch sampling for analysis.
Undiluted measurement for ultra-pure chemicals of 70% HNO3, 49% HF, 29% NH4OH, 31% H2O2, IPA, …etc.
Build-in safety interlock design for multi-chemicals switch
Exclusive multi-element NF-STD
ICPQQQ recipes certified by NF Lab with 1ppt analysis capability under TAF certification
Unique on-line auto-dilute module
Intelligent NF-HMI control interface
User friendly remote assistance design
AI lock spot and upload for OOC/OOS with auto-retained module (option)
Auto-upload to customer CIM system with customized report layout

Specification  

Description
Application 70% HNO3、49% HF、NH4F、BOE、98% H2SO4、29% NH4OH 、31% H2O2、IPA  、86% H3PO4、nBAC、TMHA、NMP、DMSO … etc.
NF provides professional customized application based on unique process for different chemicals
Element >60 Elements
Accuracy R value >0.995 ; QC sample recovery rate ±20%
Detection limit < 0.5 ppt  (Reference attachment MDL table)
Stability RSD <10 %  ( 5 ppt Multi-element mixed standard solution spike in 49% HF)
Recovery Recovery rate ±30 %
(1 ppt Multi-element mixed standard solution spike in
 49% HF / 9.6%H2SO4/31% H2O2)
Utility gas N2、CDA
Utility power 3 Phase 220 V,30 A,50~60 Hz 
Size / Weight 900 mm X 990 mm X 2256 mm ; 160 kg
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