Application Target Sampling method Instruments Type MDL

零件/產品表面污染物檢測
濾網、零部件、建材等
揮發性有機氣體逸散檢測

VOCs Outgassing TD-GC-MS Organic 0.8 ng
Metal Surface-extraction
(NF method)
ICP-MS Inorganic 0.7 ng
F-/Cl-/NO2-/Br-/NO3-/PO43-/
SO
42- /NH4+
Surface-extraction
(NF method)
IC Inorganic 220 ng
VOCs Headspace TD-GC-MS Organic ppb
P/S compounds TD-GC-FPD Inorganic
/Organic
ppm

環境/無塵室/製程氣體空降
分子檢測
煙道廢氣排放檢測

VOCs Tube/Canister/
Bag/On-line
TD-GC-MS Organic sub pptv
TD-GC-QTOF pptv
F-/Cl-/NO2-/Br-/NO3-/PO43-/SO42-
CHOO
-/CH3COO-/
Li
+/NH4+/Na+/Mg2+/K+/Ca2+/
Mn
2+/Sr2+/Ba2+
Impinger
(NF method)
IC Inorganic 1 ppbv
特定氣體不純物分析
氣體純度檢測
CO/CO2/N2/Ar/H2/He/O2/CH4/
C
2H6/C3H8
Canister GC-TCD Inorganic
/Organic
ppm
GC-PDHID 0.1ppm
總碳氫化合物(THC)檢測 THC/CH4/NMHC GC-FID Organic 1ppm
(Methane)
硫/磷化合物檢測 P/S compounds GC-FPD Inorganic
/Organic
ppm
高分子添加物解析
高分子材料單體解析 
Involatile organic compounds/
Polymer
 -- Py-GC-MS Organic --
有機溶劑雜質分析 VOCs Direct/ Dilution GC-MS Organic ppb 
差異性分析 VOCs Direct/ Dilution GC-QTOF Organic sub ppb
混酸成分分析 F-/Cl-/NO2-/Br-/NO3-/PO43-/SO42- /
COOH-/CH3COO-/Li+/NH4+/Na+/
Mg2+/K+/Ca2+/Mn2+/Sr2+/Ba2+
Direct/ Dilution IC Inorganic < 10 ppb
超純水、化學品中陰陽離子
不純物分析

超純水品質檢測
製程化學品(酸、鹼、有機溶劑)
檢測

Metal Direct/ Dilution ICP-MS Inorganic ppq
酸濃度分析 Acid / Base  -- Auto-titrator Inorganic %
奈米粒子粒徑、濃度分析 Nanoparticle Direct/ Dilution SNP-ICP-MS Inorganic 10 nm